| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
| 介紹與半導體製程相關的技術與知識。使學生了解積體電路的整體生產過程以及各個關鍵模組技術的機制、特性與關聯性，期盼未來能以這些知識為基礎，深入從事相關課題的研發。 |
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| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
7/7: 課程說明(課綱介紹/評量規則/上課規範) |
| Week 2 |
7/8: 半導體製造概述(半導體產業發展與特性) |
| Week 3 |
7/9: 半導體材料特性(固態物理基本觀念) |
| Week 4 |
7/11: 半導體晶圓技術 |
| Week 5 |
7/14: 掃描式電子顯微鏡(SEM)技術 |
| Week 6 |
7/15(上午): 微影技術 (TSRI 陳俊淇)
|
| Week 7 |
7/15(下午): 微影技術 (TSRI 陳俊淇)
|
| Week 8 |
7/16: 期中考 |
| Week 9 |
7/18: 摻雜與載子分布分析 |
| Week 10 |
7/21: 薄膜成長技術 |
| Week 11 |
7/22(上午): 離子佈植技術 |
| Week 12 |
7/22(下午): 熱退火技術技術 |
| Week 13 |
7/23: 穿透式電子顯微鏡(TEM)技術 |
| Week 14 |
7/24: 蝕刻技術 |
| Week 15 |
7/25: 平坦化技術/表面形貌分析 |
| Week 16 |
7/28: 期末考 |
self-directed
learning |
02.Viewing multimedia materials related to industry and academia.
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| Evaluation |
| 課堂表現(10%)；期中考(50%); 期末考(50%)。 |
| Textbook & other References |
主要參考書籍為：
Introduction to Semiconductor Manufacturing Technology
(by Hong Xiao)
歐亞書局
ULSI Technology
(by C. Y. Chang and S. M. SZE)
東華書局
[勿使用非法影印教科書] |
| Teaching Aids & Teacher's Website |
| 課程教材將透過網路上傳。 |
| Office Hours |
| 視需要安排! |
| Sustainable Development Goals, SDGs(Link URL) |
02.Viewing multimedia materials related to industry and academia.
08.Decent Work and Economic Growth 09.Industry, Innovation and Infrastructure | include experience courses：N |
|