NCHU Course Outline
Course Name (中) 微製造工程(6873)
(Eng.) Microfabrication Technology
Offering Dept Graduate Institute of Precision Engineering
Course Type Elective Credits 3 Teacher LIN, MING-TZER
Department Doctoral Program in Industrial and Smart TechnologyPh.D Language English Semester 2024-FALL
Course Description 1. Learn various microfabrication technology for MEMS. 2. Understand unique requirements for MEMS fabrication. 3. Learn process design and control. 4. Learn about merging mechanical devices with circuits. 5. Learn current trends and future technology direction for MEMS.
Prerequisites
self-directed learning in the course Y
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
Learn various microfabrication technology for MEMS. Understand unique requirements for MEMS fabrication
1.
2.
3.
5.
30
20
20
30
Discussion
Lecturing
Oral Presentation
Assignment
Quiz
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 Patterning by optical, X-Ray, and E-Beam lithography.
Week 2 Patterning by optical, X-Ray, and E-Beam lithography.
Week 3 Selective wet etching processes.
Week 4 Selective wet etching processes.
Week 5 Directional dry etching processes.
Week 6 Directional dry etching processes.
Week 7 Thin-film deposition by evaporation.
Week 8 Thin-film deposition by evaporation.
Week 9 Midterm Exam
Week 10 Sputtering, electroplating, chemical vapor deposition, and laser assisted deposition.
Week 11 Sputtering, electroplating, chemical vapor deposition, and laser assisted deposition.
Week 12 Bonding and release of mechanical structures.
Week 13 Bonding and release of mechanical structures.
Week 14 Bulk and surface micromachining for MEMS.
Week 15 Bulk and surface micromachining for MEMS.
Week 16 Future trends and development in MEMS technology.
Week 17 Self-directed learning

Project Report
Week 18 Self-directed learning

Project Report
Evaluation
Homework 10%, Oral Report 20%, Midterm Exams 30%, Final Exam 30%
Textbook & other References
1. S. D. Senturia, Microsystem Design, 2001, Kluwer Academic Publishing.Required Text:
2. S. A. Campbell, “The Science and Engineering of Microelectronic Fabrication”, Oxford, 2001.
Teaching Aids & Teacher's Website

Office Hours
週二10:00-12:00, 週三15:00-17:00
Sustainable Development Goals, SDGs
04.Quality Education   08.Decent Work and Economic Growth   09.Industry, Innovation and Infrastructureinclude experience courses:N
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Update Date, year/month/day:2024/09/18 13:35:13 Printed Date, year/month/day:2024 / 10 / 11
The second-hand book website:http://www.myub.com.tw/