NCHU Course Outline
Course Name (中) 奈米加工技術(6810)
(Eng.) Nano Fabrication Technology
Offering Dept Graduate Institute of Precision Engineering
Course Type Elective Credits 3 Teacher YANG,HSIHARNG
Department Master Program in Industrial and Smart Technology/Graduate Language English Semester 2024-FALL
Course Description This course aims to understand subjects related to nanofabrication technologies including their theories, processing and applications. Main contents include nanolithology, nano-particles beams machining, nano-probes and metrology etc. Through these advanced technologies, recent industrial applications may be introduced for emerging products.
Prerequisites
self-directed learning in the course Y
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
Study some nanofabrication technologies
1.
2.
3.
5.
20
30
20
30
topic Discussion/Production
Lecturing
Quiz
Written Presentation
Oral Presentation
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 Introduction to Nanotechnology
Week 2 Nanosyrems and molecular mechanics
Week 3 Nano electron beam lithography
Week 4 Near Field Optical lithography
Week 5 Scanning probe microscopy machining
Week 6 Atomic force microscopy machining process
Week 7 Focused ion beam machining
Week 8 Nano-imprinting
Week 9 Mid-term exam.
Week 10 Nano-electroforming technology
Week 11 Carbon nano-tubes fabrication and applications
Week 12 Nano-energy technology
Week 13 Nano-biotechnology
Week 14 Nano networking
Week 15 Technical writing
Week 16 Final Exam
Week 17 Project presentation
Week 18 Project presentation
Evaluation
Exam.(60%), Assignment and report(30%), Attendance(10%)
Textbook & other References
Textbook:
1. Lecture’s handout sent by email

References:
1. K.E. Drexler, Nanosystems: molecular machinery, manufacturing, and computation, Wiley Interscience, 1992.
2. Nanotechnology, a journal published by Institute of Physics.
3. Nano Letters, a journal published by American Chemical Society
Teaching Aids & Teacher's Website
Lecture’s handout sent by email
Office Hours
Tuesday 15:00-17:00, Thu 8:00-10:00AM
Sustainable Development Goals, SDGs
09.Industry, Innovation and Infrastructure   12.Responsible Consumptioninclude experience courses:N
Please respect the intellectual property rights and use the materials legally.Please repsect gender equality.
Update Date, year/month/day:2024/07/02 09:59:56 Printed Date, year/month/day:2024 / 10 / 11
The second-hand book website:http://www.myub.com.tw/