NCHU Course Outline
Course Name (中) 半導體金屬薄膜製程與再生(6860)
(Eng.) Process and Recycling of Metal Thin-Films for Semiconductor Fabrication
Offering Dept Master Program in Semiconductor and Green Technology
Course Type Elective Credits 3 Teacher Liu, Fan-Wei
Department Master Program in Semiconductor and Green Technology/Graduate Language 中/英文 Semester 2024-FALL
Course Description 各類有色金屬及稀有金屬材料在半導體業扮演要角,本課程首先講授金屬薄膜在半導體製造之應用與製程,內容包括薄膜製程方法及原理簡介,含真空及成長原理、物理氣相沉積及化學氣相沉積等。後續則講授各類薄膜製程所用金屬靶材之冶金技術、廢料與廢棄產品再生與資源化方法。
Prerequisites
self-directed learning in the course Y
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
本課程講授重點為半導體業之金屬薄膜(包括各種主要金屬與貴金屬)鍍膜原理、製程、應用及資源再生循環技術。
1.
2.
3.
5.
25
40
15
20
topic Discussion/Production
Lecturing
Written Presentation
Attendance
Oral Presentation
Quiz
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 課程介紹/評分標準
Week 2 半導體金屬薄膜技術之概述
Week 3 電晶體原理
Week 4 真空科學與技術
Week 5 物理氣相沉積:熱蒸鍍
Week 6 物理氣相沉積:濺鍍
Week 7 物理氣相沉積:離子束及其他技術
Week 8 化學氣相沉積
Week 9 期中考(筆試)
Week 10 金屬薄膜特性
Week 11 靶材製造及冶金概論
Week 12 銅、鋁靶材冶金及再生技術
Week 13 鈦、鎢靶材冶金及再生技術
Week 14 鎳、鉭靶材冶金及再生技術
Week 15 貴金屬靶材冶金及再生技術
Week 16 期末報告
Week 17 自主學習:期末報告製作1
Week 18 自主學習:期末報告製作2
Evaluation
(1)期中測驗(35%):期中進行測驗,了解同學課程學習效果作為修正之參考。
(2)期末報告(50%):目的引導同學對課程應用於金屬材料提煉與再生領域之認知。
(3)平常表現(15%):了解同學平日上課學習情況與表現。
Textbook & other References
1. Materials Science of Thin Films - Deposition and Structure, M. Ohring, Academic Press, 2nd Edition, 2001
2.Priciples of Extractive Metallurgy, Fathi Habashi, John Wiley & Sons Inc., 1997
3.冶金學概論,郁仁貽,徐氏基金會出版
4.授課教師自行編寫之講義
Teaching Aids & Teacher's Website
自編講義
Office Hours
Email預約
Sustainable Development Goals, SDGs
07.Affordable and Clean Energy   09.Industry, Innovation and Infrastructure   12.Responsible Consumptioninclude experience courses:N
Please respect the intellectual property rights and use the materials legally.Please repsect gender equality.
Update Date, year/month/day:2024/09/02 13:35:26 Printed Date, year/month/day:2024 / 10 / 11
The second-hand book website:http://www.myub.com.tw/