NCHU Course Outline
Course Name (中) 奈米加工技術(6810)
(Eng.) Nano Fabrication Technology
Offering Dept Graduate Institute of Precision Engineering
Course Type Elective Credits 3 Teacher YANG,HSIHARNG
Department Graduate Institute of Precision Engineering/Graduate Language English Semester 2024-FALL
Course Description This course aims to understand subjects related to nanofabrication technologies including their theories, processing and applications. Main contents include nanolithology, nano-particles beams machining, nano-probes and metrology etc. Through these advanced technologies, recent industrial applications may be introduced for emerging products.
Prerequisites
self-directed learning in the course Y
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
Study some nanofabrication technologies
1.Ability to apply knowledge of mathematics, science, and manufacturing engineering
2.Ability to design and conduct experiments as well as to analyze data
3.Ability to integrate the fabrication process, device and system design, and product design
5.Ability to extend the world view of Precision Engineering and micro technology
30
20
30
20
topic Discussion/Production
Lecturing
Quiz
Written Presentation
Oral Presentation
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 Introduction to Nanotechnology
Week 2 Nanosyrems and molecular mechanics
Week 3 Nano electron beam lithography
Week 4 Near Field Optical lithography
Week 5 Scanning probe microscopy machining
Week 6 Atomic force microscopy machining process
Week 7 Focused ion beam machining
Week 8 Nano-imprinting
Week 9 Mid-term exam.
Week 10 Nano-electroforming technology
Week 11 Carbon nano-tubes fabrication and applications
Week 12 Nano-energy technology
Week 13 Nano-biotechnology
Week 14 Nano networking
Week 15 Technical writing
Week 16 Final Exam
Week 17 Project presentation
Week 18 Project presentation
Evaluation
Exam.(60%), Assignment and report(30%), Attendance(10%)
Textbook & other References
Textbook:
1. Lecture’s handout sent by email

References:
1. K.E. Drexler, Nanosystems: molecular machinery, manufacturing, and computation, Wiley Interscience, 1992.
2. Nanotechnology, a journal published by Institute of Physics.
3. Nano Letters, a journal published by American Chemical Society
Teaching Aids & Teacher's Website
Lecture’s handout sent by email
Office Hours
Tuesday 15:00-17:00, Thu 8:00-10:00AM
Sustainable Development Goals, SDGs
09.Industry, Innovation and Infrastructure   12.Responsible Consumptioninclude experience courses:N
Please respect the intellectual property rights and use the materials legally.Please repsect gender equality.
Update Date, year/month/day:2024/07/02 10:00:39 Printed Date, year/month/day:2024 / 10 / 13
The second-hand book website:http://www.myub.com.tw/