NCHU Course Outline
Course Name (中) 微機電系統(6877)
(Eng.) Micro-Electro-Mechanical Systems (MEMS)
Offering Dept Graduate Institute of Precision Engineering
Course Type Elective Credits 3 Teacher WANG, DUNG-AN
Department Graduate Institute of Precision Engineering/Graduate Language English Semester 2024-FALL
Course Description Study of design and analysis techniques for microelectromechanical devices and systems and their applications. Emphases are on microsensors and microactuators in multi-physics domain. The course will include a term project that involves the design, analysis and layout of a MEMS device.
微機電系統的設計、分析及應用。著重於多重物理定義域的微感測器及微致動器。此課程將需繳交一個微機電裝置的設計分析及佈局的期末報告。
Prerequisites
self-directed learning in the course N
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
Study of design and analysis of microelectromechanical devices and systems and their applications.
學習微機電系統的設計、分析及應用。
1.Ability to apply knowledge of mathematics, science, and manufacturing engineering
3.Ability to integrate the fabrication process, device and system design, and product design
5.Ability to extend the world view of Precision Engineering and micro technology
40
40
20
Exercises
Discussion
Lecturing
Oral Presentation
Assignment
Quiz
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 Overview
Week 2 Bulk micromachining
Week 3 Surface micromachining
Week 4 Elasticity
Week 5 Elasticity
Week 6 EXAM I
Week 7 Mechanical structures
Week 8 Mechanical structures
Week 9 Energy methods
Week 10 Energy methods
Week 11 ExaM II
Week 12 Actuators
Week 13 Dynamics
Week 14 Dynamics
Week 15 System modeling
Week 16 Symterm modeling
Week 17 Case study
Week 18 Final exam
Evaluation
Homework 50%, Project 50%
Textbook & other References
S. D. Senturia, “Microsystem Design”, Kluwer Acamedic Publishers. 2001
Teaching Aids & Teacher's Website
ilearning
Office Hours
Tuesdays 11 – noon
Sustainable Development Goals, SDGs
04.Quality Education   07.Affordable and Clean Energy   09.Industry, Innovation and Infrastructureinclude experience courses:N
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Update Date, year/month/day:2024/07/11 10:05:45 Printed Date, year/month/day:2024 / 10 / 04
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