| Course Name |
(中) 真空系統概論(4112) |
| (Eng.) Introduction to Vacuum System |
| Offering Dept |
Department of Mechanical Engineering |
| Course Type |
Elective |
Credits |
3 |
Teacher |
LU, MING-CHYUAN |
| Department |
Department of Mechanical Engineering/Undergraduate |
Language |
中/英文 |
Semester |
2024-FALL |
| Course Description |
此課程之內容將包含真空系統的介紹、氣體在真空下的基本性質、真空環境氣體在固體表面特性、真空幫浦的特性、真空量測之特性、真空元件以及真空電漿系統之應用案例討。
The content of this course will include the introduction to the fundamental theory of vacuum, components for the vacuum system integration, and the application of vacuum plasma in semiconductor industry. The chapters will include the gas property, gas on solid surface, vacuum pumps, vacuum measurement, vacuum material selection, and the vacuum plasma application to semiconductor industry. |
| Prerequisites |
|
self-directed learning in the course |
Y |
| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
使學生了解真空系統分析，設計原理及各種真空元件之特性與應用，建立學生在真空系統應用之基礎。
Let students understand the basic characteristics of vacuum system and components to have the basic skill for working with vacuum system in industry. |
| 1.The ability to apply the knowledge of math, science, and mechanical engineering. |
| 2.The ability to design and conduct experiments, as well as to analyze the data obtained. |
| 3.The ability to work with others as a team to design and manufacture products of mechanical engineering systems. |
| 4.The ability humanities awareness and a knowledge of contemporary issues, and to understand the impact of science and engineering technologies, environmental, societal, and global context. |
| 5.The ability of continuing study and self-learning. |
| 6.The knowledge of professional ethics and social responsibilities of a mechanical engineer. |
|
|
| topic Discussion/Production |
| Other |
| Lecturing |
|
|
| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
真空系統介紹(Introduction to Vacuum ) |
| Week 2 |
自主學習 (Self Learning) |
| Week 3 |
真空電漿系統簡介(Introduction to Vacuum Plasma System) |
| Week 4 |
氣體基本性質(Gas Property) |
| Week 5 |
10/10 放假 (Holiday) |
| Week 6 |
氣流、氣導與氣體的吸附和放出(Gas Release from Solids) |
| Week 7 |
氣流、氣導與氣體的吸附和放出(Gas Release from Solids) |
| Week 8 |
機械真空幫浦與抽氣效率(Mechanical Vacuum Pump and Pumping Speed) |
| Week 9 |
期中考11/07 (Midterm Exam.) |
| Week 10 |
高真空幫浦 (High Vacuum Pump) |
| Week 11 |
真空量測元件與測漏 (Vacuum Gauge and Leaking Test) |
| Week 12 |
真空材料與元件 (Material and Device for Vacuum) |
| Week 13 |
真空材料與元件 (Material and Device for Vacuum) |
| Week 14 |
真空電漿系統(Plasma System) |
| Week 15 |
真空電漿在半導體製程之應用(Vacuum Plasma in Semiconductor Application) |
| Week 16 |
第二次期中考 12/26 (Second Midterm Exam. ) |
| Week 17 |
專題口頭報告01/02 (Oral Presentation for the project) |
| Week 18 |
自主學習 (Self Learning) |
|
| Evaluation |
專題口頭報告:20%
期中考試:40%
期末考試:40% |
| Textbook & other References |
參考書目：
1.John F.O’Hanlon, A User’s Guide to Vacuum Technology, John Wiley & sons,
Inc., 2003.
2.Marsbed H.Hablanian,High Vacuum Technology,A practical guide,CRC Press, 1997.
3.“真空技術與應用”精密儀器發展中心, 2001. |
| Teaching Aids & Teacher's Website |
| iLearning 數位教學平台 |
| Office Hours |
| 星期四 (Thurs.) 17:10~18:00 |
| Sustainable Development Goals, SDGs |
| 08.Decent Work and Economic Growth 12.Responsible Consumption | include experience courses：N |
|