NCHU Course Outline
Course Name (中) 半導體儀器分析之雙束型聚焦離子束系統實作課程(7534)
(Eng.) Hands-on Course on Dual Beam Focused Ion Beam System in Semiconductor Instrumentation
Offering Dept i-Center for Advanced Science and Technology
Course Type Elective Credits 0 Teacher KUMAR UTKARSH ect.
Department General Language 中/英文 Semester 2026-SPRING
Course Description 雙束型聚焦離子束系統原理及儀器基本操作使用
Principles of Dual Beam Focused Ion Beam System and Basic Instrument Operation
Prerequisites
self-directed learning in the course Y
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
本課程介紹雙束型聚焦離子束(Dual Beam-FIB)的儀器原理及其應用於材料微結構之分析方法。期藉由本課程的修習讓學生充分了解各項設備的功能,進而活用於其研究工作。
This course introduces the principles of Dual Beam Focused Ion Beam (Dual Beam-FIB) and its applications in the analysis of material microstructure. By completing this course, students will gain a thorough understanding of the functionalities of various equipment, enabling them to effectively apply these tools in their research work.
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 雙束型聚焦離子束(Dual Beam-FIB)
-穿透式電子顯微鏡試片製備
-定點剖面與SEM觀察
-離子穿隧影像對比

Dual Beam Focused Ion Beam (Dual Beam-FIB)

-Sample Preparation for Transmission Electron Microscopy (TEM)
-Site-Specific Cross-Sectioning and SEM Observation
-Ion-Tunneling Image Comparison
Week 2
Week 3
Week 4
Week 5
Week 6
Week 7
Week 8
Week 9
Week 10
Week 11
Week 12
Week 13
Week 14
Week 15
Week 16
self-directed
learning
   01.Participation in professional forums, lectures, and corporate sharing sessions related to industry-government-academia-research exchange activities.
   03.Preparing presentations or reports related to industry and academia.

Evaluation
Attendance and Project Report
Textbook & other References

Teaching Aids & Teacher's Website

Office Hours

Sustainable Development Goals, SDGs(Link URL)
include experience courses:N
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Update Date, year/month/day:2026/01/15 10:53:51 Printed Date, year/month/day:2026 / 3 / 10
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