NCHU Course Outline
Course Name (中) 微電子真空技術(6779)
(Eng.) Microelectronics Vacuum Technology
Offering Dept Department of Electrical Engineering
Course Type Elective Credits 3 Teacher Ma Zon
Department Industrial Technology Master Program in Electronic Systems(R)Graduate Language English Semester 2026-SPRING
Course Description This course introduces students to the principles, equipment, and applications of modern vacuum systems. It covers the fundamentals of gas behavior, pressure regimes, and surface interactions, as well as the practical applications of vacuum technology in semiconductor fabrication, thin-film deposition, nanostructure growth, and analytical instrumentation.
Prerequisites
self-directed learning in the course Y
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
- To understand the physics underlying vacuum environments.
- To gain familiarity with the design and operation of vacuum equipment.
- To apply vacuum techniques to materials science, electronics, and nanotechnology.
- To develop troubleshooting and optimization skills for laboratory and industrial systems.
topic Discussion/Production
Exercises
Discussion
Lecturing
Written Presentation
Oral Presentation
Assignment
Quiz
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 Introduction to Vacuum Microelectronics and Vacuum Technology
Week 2 Foundation: Gas Properties and Gas Laws
Week 3 Gas Flow
Week 4 Gas Release from Solids (I)
Week 5 Gas Release from Solids (II)
Week 6 Creation of a Vacuum
Week 7 Vacuum Measurements
Week 8 Midterm Exam
Week 9 Vacuum Applications
High-Vacuum-Based Processes: Sputtering
Week 10 Vacuum Applications
High-Vacuum-Based Processes: Plasma Etching (I)
Week 11 Vacuum Applications
High-Vacuum-Based Processes: Plasma Etching (II)
Week 12 Vacuum Applications
High-Vacuum-Based Processes: Ion Beam Technology
Week 13 Vacuum Applications
High-Vacuum-Based Processes: Pulsed Laser Deposition
Week 14 Vacuum Applications
High-Vacuum-Based Processes: Plasma-Enhanced Chemical Vapor Deposition
Week 15 Common Analytical Methods for Surface and Thin Film
Week 16 Final Exam
self-directed
learning		    03.Preparing presentations or reports related to industry and academia.
-In-depth self-study in relevant literature, research papers, and industrial reports related to microelectronics vacuum technology
-Written report and oral presentation about the topics of self-study
Evaluation
1. Classroom performance 10%
2. Homework and quiz 10%
3. Report and presentation 20%
4. Midterm exam 30%
5. Final exam 30%
Textbook & other References
1. Dorothy M. Hoffman, Bowa Singh, John H. Thomas, III, "Handbook of Vacuum Science and Technology," Academic Press, 1998.
2. Karl Jousten, “Handbook of Vacuum Technology,” Wiley-VCH, 2nd Edition, 2016.
3. John F. O'Hanlon, "A User Guide to Vacuum Technology," Cambridge University Press, John Wiley & Sons, Inc., 3rd Edition, 2003.
Teaching Aids & Teacher's Website

Office Hours
Wednesday 9:10-12:00
Sustainable Development Goals, SDGs(Link URL)
04.Quality Education   08.Decent Work and Economic Growth   09.Industry, Innovation and Infrastructureinclude experience courses：N
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Update Date, year/month/day：2026/01/14 21:31:09 Printed Date, year/month/day：2026 / 3 / 10
The second-hand book website：http://www.myub.com.tw/