NCHU Course Outline
Course Name (中) 半導體儀器分析之場發射顯微鏡檢測分析實作課程(7531)
(Eng.) Hand-on Course on Field Emission Microscopy Detection and Analysis in Semiconductor Instrumentation
Offering Dept i-Center for Advanced Science and Technology
Course Type Elective Credits 0 Teacher KUMAR UTKARSH ect.
Department General Language 中/英文 Semester 2026-SPRING
Course Description 場發射顯微鏡原理及儀器基本操作使用
Principles of Field Emission Microscopy and Basic Instrument Operation
Prerequisites
self-directed learning in the course Y
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
本課程介紹掃描式電子顯微鏡(SEM)的儀器原理及其應用於材料化學組成、微結構之分析方法。期藉由本課程的修習讓學生充分了解各項設備的功能,進而活用於其研究工作。
This course introduces the principles of Scanning Electron Microscopy (SEM) and its applications in the analysis of material chemical composition and microstructure. By completing this course, students will gain a thorough understanding of the functionalities of various equipment, enabling them to effectively apply these tools in their research work.
topic Discussion/Production
Visit
Other
Lecturing
Written Presentation
Attendance
Study Outcome
Internship
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 掃描式電子顯微鏡(SEM)
- SEM儀器構造與成像原理
- 電子束與材料之作用
- 二次電子影像(SEI)
- 背向散射電子影像(BEI)
- X光能譜儀(EDS)
Scanning Electron Microscope (SEM)
-Structure and Imaging Principles of SEM Instruments
-Interaction of Electron Beam with Materials
-Secondary Electron Imaging (SEI)
-Backscattered Electron Imaging (BEI)
-X-ray Spectroscopy (EDS)
Week 2
Week 3
Week 4
Week 5
Week 6
Week 7
Week 8
Week 9
Week 10
Week 11
Week 12
Week 13
Week 14
Week 15
Week 16
self-directed
learning
   01.Participation in professional forums, lectures, and corporate sharing sessions related to industry-government-academia-research exchange activities.
   03.Preparing presentations or reports related to industry and academia.

Evaluation
Attendance and Project Report
Textbook & other References

Teaching Aids & Teacher's Website

Office Hours

Sustainable Development Goals, SDGs(Link URL)
include experience courses:N
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Update Date, year/month/day:2026/01/15 10:49:05 Printed Date, year/month/day:2026 / 3 / 10
The second-hand book website:http://www.myub.com.tw/