| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
1. Mechanical Micro structure design by finite element analyses: Design a cantilever-based accelerometer structure compliant with ST MEMS specifications (e.g., LSM6DS series) using 1P6M process.
2 Readout Circuit Integration: Design a capacitive readout IC and perform co-simulation with the MEMS structure.
3 Process and Verification: Complete Design Rule Checking (DRC) and analyze manufacturability.
|
| 1.Ability to apply knowledge of mathematics, science, and manufacturing engineering |
| 2.Ability to design, conduct experiments, analyze data and write research papers |
| 5.Possess innovative thinking, problem-solving abilities, and an international perspective in precision engineering and micro-system technology |
|
|
|
|
| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
Study the mechanical structure of existing ST MEMS accelerometers (e.g., LSM303AGR, mass-spring system). |
| Week 2 |
Design a cantilever structure adhering to1P6M design rules (e.g., minimum line width, interlayer dielectric materials) using finite element analyses. |
| Week 3 |
Simulate mechanical sensitivity (e.g., displacement vs. acceleration) and resonant frequency. |
| Week 4 |
3D model of the MEMS structure and simulation report (including stress analysis). |
| Week 5 |
Design a capacitive sensing circuit (e.g., differential capacitance-to-voltage converter), considering UMC 1P6M analog circuit constraints (e.g., parasitic capacitance). |
| Week 6 |
Use spice for circuit design and perform co-simulation with the MEMS structure using matlab. |
| Week 7 |
Optimize noise performance and signal chain (e.g., chopper stabilization). |
| Week 8 |
Circuit schematic and post-layout simulation results. |
| Week 9 |
Integrate MEMS and circuit layouts (GDSII file) and verify DRC/LVS using PDK. |
| Week 10 |
Propose a mock-up test plan (e.g., via TSRI’s MPW service). |
| Week 11 |
validate performance using Finite Element Analysis (FEA). |
| Week 12 |
validate performance using Finite Element Analysis (FEA). |
| Week 13 |
validate performance using Finite Element Analysis (FEA). |
| Week 14 |
Complete GDSII file |
| Week 15 |
Manufacturability report (including cost and yield estimates). |
| Week 16 |
Final report |
self-directed
learning |
01.Participation in professional forums, lectures, and corporate sharing sessions related to industry-government-academia-research exchange activities.
03.Preparing presentations or reports related to industry and academia.
|
|
| Evaluation |
| Homework 100% |
| Textbook & other References |
| Amar Khennane, “Introduction to Finite Element Analysis Using MATLAB® and Abaqus”, 2013, Taylor & Francis Group, LLC. |
| Teaching Aids & Teacher's Website |
| Ilearning |
| Office Hours |
| Tuesdays noon-1pm |
| Sustainable Development Goals, SDGs(Link URL) |
| 04.Quality Education 08.Decent Work and Economic Growth 09.Industry, Innovation and Infrastructure | include experience courses：N |
|