NCHU Course Outline
Course Name (中) 真空系統概論(4112)
(Eng.) Introduction to Vacuum System
Offering Dept Department of Mechanical Engineering
Course Type Elective Credits 3 Teacher LU, MING-CHYUAN
Department Department of Mechanical Engineering/Undergraduate Language 中/英文 Semester 2026-FALL
Course Description 此課程之內容將包含真空系統的介紹、氣體在真空下的基本性質、真空幫浦的特性、真空量測之特性、真空元件以及真空之應用案例討。
Prerequisites
self-directed learning in the course Y
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
1. 使學生了解真空系統分析,設計原理及各種真空元件之特性與應用,建立學生在真空系統應用之基礎。
1.The ability to apply the knowledge of math, science, and mechanical engineering.
2.The ability to design and conduct experiments, as well as to analyze the data obtained.
3.The ability to work with others as a team to design and manufacture products of mechanical engineering systems.
4.The ability humanities awareness and a knowledge of contemporary issues, and to understand the impact of science and engineering technologies, environmental, societal, and global context.
5.The ability of continuing study and self-learning.
6.The knowledge of professional ethics and social responsibilities of a mechanical engineer.
30
15
15
5
30
5
Lecturing
Attendance
Quiz
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 放假 (Holiday)
Week 2 1.真空系統與應用介紹(Introduction to Vacuum and applications)
Week 3 2.真空電漿系統簡介(Introduction to Vacuum Plasma System)
Week 4 放假 (Holiday)
Week 5 3.氣體基本性質(Gas Property)
Week 6 4.氣流、氣導與氣體的吸附和放出(Gas Release from Solids)
Week 7 4.氣流、氣導與氣體的吸附和放出(Gas Release from Solids)
Week 8 5.機械真空幫浦與抽氣效率(Mechanical Vacuum Pump and Pumping Speed)
Week 9 5.機械真空幫浦與抽氣效率(Mechanical Vacuum Pump and Pumping Speed)
Week 10 真空設備參觀與解說(Equipment Visit)
Week 11 期中考(Midterm Exam.)
Week 12 6.高真空幫浦 (High Vacuum Pump)
Week 13 7.真空量測元件與測漏 (Vacuum Gauge and Leaking Test)
Week 14 7.真空量測元件與測漏 (Vacuum Gauge and Leaking Test)
Week 15 8.真空材料與元件 (Material and Device for Vacuum)
Week 16 8.真空材料與元件 (Material and Device for Vacuum)m.電漿與真空系統應用(Vacuum Plasma and the Application of Vacuum System) 期末考 (Final Exam.)
self-directed
learning

Evaluation
課堂參與:10%
期中考試:40%
學期考試:50%
Textbook & other References
參考書目:
1.John F.O’Hanlon, A User’s Guide to Vacuum Technology, John Wiley & sons,
Inc., 2003.
2.Marsbed H.Hablanian,High Vacuum Technology,A practical guide,CRC Press, 1997.
3.“真空技術與應用”精密儀器發展中心, 2001.
Teaching Aids & Teacher's Website
iLearning 數位教學平台
Office Hours
星期一 17:10~18:00
Sustainable Development Goals, SDGs(Link URL)
include experience courses:N
Please respect the intellectual property rights and use the materials legally.Please respect gender equality.
Update Date, year/month/day:None Printed Date, year/month/day:2026 / 6 / 19
The second-hand book website:http://www.myub.com.tw/