NCHU Course Outline

Course Name	(中) 微電子真空技術(6779)
	(Eng.) Microelectronics Vacuum Technology
Offering Dept	Department of Electrical Engineering
Course Type	Elective	Credits	3	Teacher	Ma Zon
Department	Department of Electrical Engineering/Graduate	Language	English	Semester	2026-SPRING
Course Description	This course covers the fundamental principles and cutting-edge applications of vacuum microelectronics, including field emission theory, microfabrication techniques, and the unique advantages of operating in vacuum environments. Students will explore how vacuum microelectronics outperform traditional semiconductor technologies.
Prerequisites				self-directed learning in the course	Y

Relevance of Course Objectives and Core Learning Outcomes(%)			Teaching and Assessment Methods for Course Objectives
Course Objectives	Competency Indicators	Ratio(%)	Teaching Methods	Assessment Methods
-To understand and apply the fundamental concepts of field emission theory and electron emission in vacuums -To develop proficiency in microfabrication techniques used to create vacuum microelectronic devices -To analyze the performance benefits of vacuum microelectronics -To investigate the applications of vacuum microelectronics in fields like displays, microwaves, and space technology			topic Discussion/Production Exercises Discussion Lecturing	Written Presentation Oral Presentation Assignment Quiz
Course Content and Homework/Schedule/Tests Schedule
Week Course Content Week 1 Introduction to Vacuum Microelectronics and Vacuum Technology Week 2 Foundation: Gas Properties and Gas Laws Week 3 Gas Flow Week 4 Gas Release from Solids Week 5 Technological Overview of Vacuum Microelectronics Week 6 Theory of Field Emission: Physics of Electron Sources (I) Week 7 Theory of Field Emission: Physics of Electron Sources (II) Week 8 期中考試 Midterm Exam Week 9 Fabrication and Properties of Micro-field Emission Sources (I) Week 10 Fabrication and Properties of Micro-field Emission Sources (II) Week 11 Fabrication and Properties of Micro-field Emission Sources (III) Week 12 Novel Cold Cathode Materials Week 13 Vacuum Microelectronic Devices (I) Week 14 Vacuum Microelectronic Devices (II) Week 15 Vacuum Microelectronic Devices (III) Week 16 期末考試 Final Exam Independent Learning: In-depth self-study in relevant literature, research papers, and industrial reports related to microelectronics vacuum technology Independent Learning: Written report and oral presentation about the topics of self-study self-directed learning
Evaluation
1. Class performance 10% 2. Homework and Quiz 10% 3. Project Report and Presentation 20% 4. Midterm Exam 30% 5. Final Exam 30%
Textbook & other References
1. Wei Zhu (editor), “Vacuum Microelectronics,” John Wiley & Sons, 1st Edition, 2001. 2. I. Brodie and C. A. Spindt, “Advances in Electronics and Electron Physics: Vacuum Microelectronics,” vol. 83, Academic Press, Inc., 1992. 3. John F. O’ Hanlon, “A User’s Guide to Vacuum Technology,” Cambridge University Press, John Wiley & Sons, Inc., 3rd Edition, 2003.
Teaching Aids & Teacher's Website
Office Hours
Wednesday 9:10-12:00
Sustainable Development Goals, SDGs(Link URL)
04.Quality Education   08.Decent Work and Economic Growth   09.Industry, Innovation and Infrastructure include experience courses：N

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Update Date, year/month/day：None	Printed Date, year/month/day：2026 / 1 / 09
The second-hand book website：http://www.myub.com.tw/