| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
| 1. The goal of this course is to give students advanced knowledge of microfabrication processes |
| 1.Ability to apply knowledge of mathematics, science, and manufacturing engineering |
| 2.Ability to design, conduct experiments, analyze data and write research papers |
| 3.Ability to integrate the fabrication process, device and system design, and product design |
| 4.Possess leadership, management, communication and coordination, as well as project planning and management skills, along with a spirit of teamwork |
| 5.Possess innovative thinking, problem-solving abilities, and an international perspective in precision engineering and micro-system technology |
|
|
| topic Discussion/Production |
| Exercises |
| Lecturing |
|
| Attendance |
| Oral Presentation |
| Study Outcome |
| Assignment |
| Written Presentation |
| Quiz |
|
| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
1. MEMS Overview
|
| Week 2 |
1. MEMS Overview |
| Week 3 |
2. Fundamentals of Microfabrication technologies
|
| Week 4 |
2. Fundamentals of Microfabrication technologies |
| Week 5 |
3. Silicon-based Micromachining technologies
|
| Week 6 |
3. Silicon-based Micromachining technologies
|
| Week 7 |
4. LIGA Micromachining Technologies
|
| Week 8 |
4. LIGA Micromachining Technologies |
| Week 9 |
5. Precision Micromachining Technologies
|
| Week 10 |
5. Precision Micromachining Technologies
|
| Week 11 |
6. Packaging Technologies
|
| Week 12 |
6. Packaging Technologies
|
| Week 13 |
7. Microfabrication processes design of MEMS
|
| Week 14 |
7. Microfabrication processes design of MEMS
|
| Week 15 |
8. Case Study |
| Week 16 |
8. Case Study |
| Week 17 |
self study |
| Week 18 |
seif study |
|
| Evaluation |
Homework and class discussion 20%
Presentation and term paper 25%
Mid-Term 25%
Final 30%
|
| Textbook & other References |
Fundamentals of Microfabrication 2nd ed. Marc J. Madou
Microsensors MEMS and Smart Devices Julian W. Gardner et. al.
微機電系統技術與應用 國科會精密儀器中心
微系統封裝原理與技術 秋碧秀 滄海書局
|
| Teaching Aids & Teacher's Website |
|
| Office Hours |
|
| Sustainable Development Goals, SDGs(Link URL) |
| 01.No Poverty 04.Quality Education 05.Gender Equality 08.Decent Work and Economic Growth 09.Industry, Innovation and Infrastructure | include experience courses：N |
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