NCHU Course Outline
Course Name (中) 表面物理(一)(6621)
(Eng.) Surface Science and Technology(I)
Offering Dept Department of Physics
Course Type Elective Credits 3 Teacher HO, MON-SHU
Department Department of Physics/Graduate Language English Semester 2024-FALL
Course Description 表面科學在奈米科學與技術中是一個基礎且重要的研究課題。本課程將介紹表面科學的原理與技術。In the field of nanoscience and technology, surface science is a fundamental and essential research topic. This course will introduce the principles and techniques of surface science.
Prerequisites
self-directed learning in the course N
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
In terms of fundamental principles, the course will cover topics such as surface crystal structures, surface reconstruction and desorption effects, surface electronic states, surface chemical composition, surface diffusion, surface activation energy, work functions, gas adsorption and desorption equilibria, viscosity coefficients, properties and forces of atomic or molecular adsorption on surfaces, surface thin films, surface self-assembly mechanisms, and various techniques for surface property analysis.
1.Professional knowledge and skills
2.Self-learning abilities and skills
3.Abilities of clearly expressing research results
4.Problem analysis and logical deduction
40
10
30
20
Discussion
Exercises
Lecturing
topic Discussion/Production
Assignment
Oral Presentation
Written Presentation
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 Introduction to Surface Science
On the technical side, we will discuss vacuum technology, surface analytical instruments, and their analytical methods, including scanning probe microscopy, field ion microscopy, low-energy electron diffraction, Auger electron spectroscopy, photoelectron spectroscopy, secondary ion mass spectrometry, and make comparisons with conventional methods for studying material properties.
Week 2 Understanding nanoscience and surface science analytical instruments
Week 3 UHV(ultra-high-vacuum) techniques
atomic-scale structure and defects


Week 4 microscopic v.s. nanoscopic
Week 5 XRD: X-ray diffraction
Week 6 Surface scattering
Week 7 LEED(low energy electron diffraction)
Week 8 RHEED: Reflection high energy electron diffraction
Week 9 midterm presentation
Week 10 Medium energy electron diffraction
Week 11 HEIS: High energy ion scattering
ISS: Ion scattering spectroscopy
Week 12 UPS: Ultraviolet photoelectron/photoemission spectroscopy
Week 13 AES: Auger electron spectroscopy
Week 14 SIMS: Secondary ion mass spectrometry
Week 15 ESCA: Electron spectroscopy for chemical analysis (same as XPS)
Week 16 EELS: Electron energy loss spectroscopy (same as ELS)
Week 17 CVD: Chemical vapor deposition
MOCVD: Metal-organic chemical vapor deposition
Week 18 Final exam
Evaluation
midterm 20%
presentation (about surface analysis) 25%
report 1 15%
presentation 2 (project) 25%
report 2 15%
Textbook & other References
notes
Teaching Aids & Teacher's Website

Office Hours
Mon. 1-2pm, Tue. 9-12am or by appointment
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Update Date, year/month/day:None Printed Date, year/month/day:2024 / 9 / 08
The second-hand book website:http://www.myub.com.tw/