| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
| 本課程講授重點為半導體業之金屬薄膜(包括各種主要金屬與貴金屬)鍍膜原理、製程、應用及資源再生循環技術。 |
|
|
| topic Discussion/Production |
| Lecturing |
|
| Written Presentation |
| Attendance |
| Oral Presentation |
| Quiz |
|
| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
課程介紹/評分標準 |
| Week 2 |
半導體金屬薄膜技術之概述 |
| Week 3 |
電晶體原理
|
| Week 4 |
真空科學與技術
|
| Week 5 |
物理氣相沉積：熱蒸鍍 |
| Week 6 |
物理氣相沉積：濺鍍
|
| Week 7 |
物理氣相沉積：離子束及其他技術
|
| Week 8 |
化學氣相沉積
|
| Week 9 |
期中考(筆試) |
| Week 10 |
金屬薄膜特性
|
| Week 11 |
靶材製造及冶金概論
|
| Week 12 |
銅、鋁靶材冶金及再生技術
|
| Week 13 |
鈦、鎢靶材冶金及再生技術
|
| Week 14 |
鎳、鉭靶材冶金及再生技術
|
| Week 15 |
貴金屬靶材冶金及再生技術
|
| Week 16 |
期末報告
|
| Week 17 |
自主學習：期末報告製作1 |
| Week 18 |
自主學習：期末報告製作2 |
|
| Evaluation |
(1)期中測驗(35%)：期中進行測驗，了解同學課程學習效果作為修正之參考。
(2)期末報告(50%)：目的引導同學對課程應用於金屬材料提煉與再生領域之認知。
(3)平常表現(15%)：了解同學平日上課學習情況與表現。
|
| Textbook & other References |
1. Materials Science of Thin Films - Deposition and Structure, M. Ohring, Academic Press, 2nd Edition, 2001
2.Priciples of Extractive Metallurgy, Fathi Habashi, John Wiley & Sons Inc., 1997
3.冶金學概論，郁仁貽，徐氏基金會出版
4.授課教師自行編寫之講義
|
| Teaching Aids & Teacher's Website |
| 自編講義 |
| Office Hours |
| Email預約 |
| Sustainable Development Goals, SDGs |
| 04.Quality Education 07.Affordable and Clean Energy 09.Industry, Innovation and Infrastructure 12.Responsible Consumption | include experience courses：N |
|