NCHU Course Outline

Course Name	(中) 3DIC堆疊之晶圓接合(7509)
	(Eng.) Wafer Bonding Technology for 3D Integration
Offering Dept	Engineering
Course Type	Elective	Credits	1	Teacher	Undefined
Department	Engineering	Language	English	Semester	2025-FALL
Course Description	1. Bonding technology 2. Surface process for bonding 3. Surface/Interface Analysis Methods 4. Process flows for wafer boding technologies 5. Analysis methods for bonding interfaces
Prerequisites				self-directed learning in the course	N

Relevance of Course Objectives and Core Learning Outcomes(%)			Teaching and Assessment Methods for Course Objectives
Course Objectives	Competency Indicators	Ratio(%)	Teaching Methods	Assessment Methods
1. Bonding technology 2. Surface process for bonding 3. Surface/Interface Analysis Methods 4. Process flows for wafer boding technologies 5. Analysis methods for bonding interfaces			topic Discussion/Production Discussion Lecturing	Oral Presentation Quiz
Course Content and Homework/Schedule/Tests Schedule
Week Course Content Week 1 Day 1.Introduction for Bonding Technologies/ Surface / Interface Analysis for bonding (1) Microscopy Day 2.Surface / Interface Analysis for bonding (2) Crystallography/ Surface / Interface Analysis for bonding (3) Spectroscopy-1 Day 3.Surface / Interface Analysis for bonding (4) Spectroscopy-2/ Assignments Week 2 Week 3 Week 4 Week 5 Week 6 Week 7 Week 8 Week 9 Week 10 Week 11 Week 12 Week 13 Week 14 Week 15 Week 16 self-directed learning 無自主學習內容
Evaluation
To be determined
Textbook & other References
3D Process Technology, ed.Philip Garrou, Mitsumasa Koyanagi, Peter Ramm, Wiley-Blackwell, 2014
Teaching Aids & Teacher's Website
To be submitted
Office Hours
1 hour after class
Sustainable Development Goals, SDGs(Link URL)
09.Industry, Innovation and Infrastructure include experience courses：N

Please respect the intellectual property rights and use the materials legally.Please respect gender equality.
Update Date, year/month/day：2025/09/19 16:01:35	Printed Date, year/month/day：2025 / 12 / 20
The second-hand book website：http://www.myub.com.tw/