| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
| To understand and apply industry specific vocabulary related to semiconductor manufacturing processes, to gain the broad understanding of the basic IC fabrication sequence covering essential stages such as wafer manufacturing, photolithography, etching, and thin film deposition, to gain practical knowledge for a career in semiconductor manufacturing and finally to unlock career development opportunities in the dynamic semiconductor industry. |
|
|
| topic Discussion/Production |
| Exercises |
| Discussion |
| Lecturing |
|
| Written Presentation |
| Oral Presentation |
| Assignment |
| Study Outcome |
| Quiz |
|
| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
Introduction and Historical Perspective |
| Week 2 |
Introduction to Integrated Circuit Fabrication |
| Week 3 |
Semiconductor Basics |
| Week 4 |
Wafer Manufacturing |
| Week 5 |
Thermal Processes |
| Week 6 |
Lithography |
| Week 7 |
Plasma Basics |
| Week 8 |
Midterm Exam |
| Week 9 |
Ion Implantation |
| Week 10 |
Etching |
| Week 11 |
Chemical Vapor Deposition |
| Week 12 |
Metallization |
| Week 13 |
Chemical Mechanical Polishing |
| Week 14 |
Process Integration |
| Week 15 |
Integrated Circuit Processing Technologies |
| Week 16 |
Final Exam |
| Week 17 |
Independent Learning: In-depth self-study in relevant literature, research papers, and industry reports related to semiconductor manufacturing technology |
| Week 18 |
Independent Learning: Written report and oral presentation about the topics of self-study |
|
| Evaluation |
1. Homework and Quiz 10%
2. Class Performance 10%
3. Written Report and Oral Presentation 20%
4. Midterm Exam 30%
5. Final Exam 30%
|
| Textbook & other References |
1. Hong Xiao, “Introduction to Semiconductor Manufacturing Technologies”, 2nd Edition, Society of Photo-Optical Instrumentation Engineers (SPIE), 2012.
2. J. D. Plummer, M. D. Deal, and P. B. Griffin, ”Silicon VLSI Technology: Fundamentals, Practice and Modeling”, Prentice Hall, 2000.
|
| Teaching Aids & Teacher's Website |
|
| Office Hours |
| Tuesday 13:10-16:00 |
| Sustainable Development Goals, SDGs |
| 04.Quality Education 08.Decent Work and Economic Growth 09.Industry, Innovation and Infrastructure | include experience courses：N |
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