| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
| Introduce students to frication of microsystems. 介紹微系統之加工製程。 |
| 1.Ability to apply knowledge of mathematics, science, and manufacturing engineering |
| 2.Ability to design, conduct experiments, analyze data and write research papers |
| 3.Ability to integrate the fabrication process, device and system design, and product design |
| 5.Possess innovative thinking, problem-solving abilities, and an international perspective in precision engineering and micro-system technology |
|
|
| Exercises |
| Practicum |
| Lecturing |
|
| Oral Presentation |
| Assignment |
| Quiz |
|
| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
Course introduction |
| Week 2 |
MEMS introduction |
| Week 3 |
MEMS technology |
| Week 4 |
MEMS technology |
| Week 5 |
Accelerometer |
| Week 6 |
Accelerometer |
| Week 7 |
MEMS measurement |
| Week 8 |
MEMS circuit |
| Week 9 |
Virtuoso layout |
| Week 10 |
Virtuoso layout |
| Week 11 |
Klayout |
| Week 12 |
Klayout |
| Week 13 |
Design rule check |
| Week 14 |
Capacitive sening |
| Week 15 |
Piezoresistive sensing |
| Week 16 |
Piezoresistive sensing |
| Week 17 |
self-directed learning, topic: integrating AI and IoT for smart sensor |
| Week 18 |
self-directed learning, topic: integrating AI and IoT for smart sensor, submit a report to TA |
|
| Evaluation |
| Homework 50%, Project 50% |
| Textbook & other References |
| S.D. Senturia, “Microsystem Design”, Kluwer. |
| Teaching Aids & Teacher's Website |
| ilearning |
| Office Hours |
| Thursdays noon-1pm |
| Sustainable Development Goals, SDGs(Link URL) |
| 04.Quality Education 08.Decent Work and Economic Growth 09.Industry, Innovation and Infrastructure | include experience courses：N |
|