NCHU Course Outline
Course Name (中) 微觀工程科學(6839)
(Eng.) Engineering Sciences in Micro-Electro-Mechanical Systems
Offering Dept Graduate Institute of Precision Engineering
Course Type Elective Credits 3 Teacher WANG, DUNG-AN
Department Graduate Institute of Precision Engineering/Graduate Language English Semester 2026-SPRING
Course Description Introduction to micromechanics, mechanical analyses, electromagnetic analyses, principles in sensing and actuation, fabrication parameters and material properties of MicroElectroMechanical systems. The course will include a term project.
簡介微機電系統之機械力學,電磁分析,感測與致動原理,製程參數與材料特性。此課程將需繳交一份期末報告。



Prerequisites
self-directed learning in the course Y
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
Build a strong foundation for continuous learning in microelectromechanical systems. Electromechanics is emphasized in the teaching process. A semester long project will get students familiar with the MEMS chip design process. Prepare students as a future MEMS engineer.
Lecturing
Discussion
Exercises
Written Presentation
Quiz
Assignment
Oral Presentation
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 1 Course introduction
Week 2 2 Heat conduction, elasticity, thermoelasticity HW1
Week 3 3 Fluid dynamics, electromagnetism
Week 4 4 Scaling HW2
Week 5 5 Thermally driven systems
Week 6 6 Layout
Week 7 7 Elastic structures HW3
Week 8 8 Elastic structures
Week 9 9 Thermal-elastic systems HW4
Week 10 10 Electrostatic-elastic systems
Week 11 11 Electrostatic-elastic systems
Week 12 12 Design rule
Week 13 13 Magnetically actuated systems HW5 (Project proposal)
Week 14 14 Magnetically actuated systems
Week 15 15 Microfluidics HW6 (Process report)
Week 16 6 Microfluidics
Ϲ Layout Final report
Ϻ FINAL report
self-directed
learning
   01.Participation in professional forums, lectures, and corporate sharing sessions related to industry-government-academia-research exchange activities.
   02.Viewing multimedia materials related to industry and academia.

Evaluation
Homework 50%, Project 50%



Textbook & other References
Required Text: J.A. Pelesko, D.H. Bernstein, “Modeling MEMS and NEMS”, Chapman & Hall/CRC.
Recommended Text: V.K. Varadan, K.J. Vinoy, K.A. Jose, “RF MEMS and Their applications”, Wiley.



Teaching Aids & Teacher's Website
web.nchu.edu.tw/~daw/Teaching/MEMSSCI/engi_sci_mems.htm



Office Hours
Tuesdays 11 – noon




Sustainable Development Goals, SDGs(Link URL)
04.Quality Education   08.Decent Work and Economic Growth   09.Industry, Innovation and Infrastructure   10.Reduced Inequalities   17.Partnerships for the Goalsinclude experience courses:N
Please respect the intellectual property rights and use the materials legally.Please respect gender equality.
Update Date, year/month/day:2026/01/07 16:04:05 Printed Date, year/month/day:2026 / 1 / 09
The second-hand book website:http://www.myub.com.tw/