| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
Build a strong foundation for continuous learning in microelectromechanical systems. Electromechanics is emphasized in the teaching process. A semester long project will get students familiar with the MEMS chip design process. Prepare students as a future MEMS engineer.
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| Lecturing |
| Discussion |
| Exercises |
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| Written Presentation |
| Quiz |
| Assignment |
| Oral Presentation |
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| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
1 Course introduction
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| Week 2 |
2 Heat conduction, elasticity, thermoelasticity HW1
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| Week 3 |
3 Fluid dynamics, electromagnetism
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| Week 4 |
4 Scaling HW2
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| Week 5 |
5 Thermally driven systems
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| Week 6 |
6 Layout
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| Week 7 |
7 Elastic structures HW3
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| Week 8 |
8 Elastic structures
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| Week 9 |
9 Thermal-elastic systems HW4
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| Week 10 |
10 Electrostatic-elastic systems
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| Week 11 |
11 Electrostatic-elastic systems
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| Week 12 |
12 Design rule |
| Week 13 |
13 Magnetically actuated systems HW5 (Project proposal)
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| Week 14 |
14 Magnetically actuated systems
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| Week 15 |
15 Microfluidics HW6 (Process report)
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| Week 16 |
6 Microfluidics
Ϲ Layout Final report
Ϻ FINAL report
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self-directed learning |
   01.Participation in professional forums, lectures, and corporate sharing sessions related to industry-government-academia-research exchange activities.    02.Viewing multimedia materials related to industry and academia.
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| Evaluation |
Homework 50%, Project 50%
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| Textbook & other References |
Required Text: J.A. Pelesko, D.H. Bernstein, “Modeling MEMS and NEMS”, Chapman & Hall/CRC.
Recommended Text: V.K. Varadan, K.J. Vinoy, K.A. Jose, “RF MEMS and Their applications”, Wiley.
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| Teaching Aids & Teacher's Website |
web.nchu.edu.tw/~daw/Teaching/MEMSSCI/engi_sci_mems.htm
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| Office Hours |
Tuesdays 11 – noon
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| Sustainable Development Goals, SDGs(Link URL) |
| 04.Quality Education   08.Decent Work and Economic Growth   09.Industry, Innovation and Infrastructure   10.Reduced Inequalities   17.Partnerships for the Goals | include experience courses:N |
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