NCHU Course Outline
Course Name (中) 奈米加工技術(6974)
(Eng.) Nano Fabrication Technology
Offering Dept Master Program in Industrial and Smart Technology
Course Type Elective Credits 3 Teacher SU,FA-CHENG
Department Master Program in Industrial and Smart Technology/Graduate Language English Semester 2026-SPRING
Course Description This course aims to introduce and develop an understanding of the fundamental theories, fabrication processes, and practical applications of nanofabrication technologies. The course covers topics including nanolithography, nanoparticle- and beam-based machining, nanoprobe technologies, as well as nanoscale metrology and characterization methods. Through the introduction of these advanced nanofabrication techniques, the course also highlights their latest industrial applications in emerging products.
本課程旨在介紹並理解奈米加工技術相關之理論基礎、製程方法與實際應用。課程內容涵蓋奈米微影技術、奈米粒子與束流加工、奈米探針技術及奈米量測與檢測方法等。透過這些先進奈米加工技術之介紹，課程亦將說明其於新興產品中的最新產業應用發展。
Prerequisites
self-directed learning in the course Y
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
1. Acquire core professional knowledge in nanofabrication technologies.
2. Develop the ability to investigate and study issues related to nanofabrication technologies.
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Discussion
Lecturing
Attendance
Oral Presentation
Quiz
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 Introduction to Nanotechnology (奈米科技介紹)、Technical writing (科技寫作)
Week 2 Nano-systems and molecular mechanics (奈米系統與分子力學)
Week 3 Nano electron beam lithography (奈米電子束微影/曝光)
Week 4 Near Field Optical Lithography (近場光學微影技術)
Week 5 Scanning Probe Microscopy Machining (掃描探針顯微加工技術)
Week 6 Atomic Force Microscopy Machining Process (原子力顯微鏡加工製程)
Week 7 Focused Ion Beam Machining and Nano-imprinting (聚焦離子束加工與奈米壓印技術)
Week 8 Midterm Exam (期中考試)
Week 9 Nano-electroforming Technology (奈米電鑄技術)
Week 10 Carbon Nanotubes Fabrication and Applications (奈米碳管製備與應用)
Week 11 Nano-energy Technology (奈米能源技術)
Week 12 Nano-biotechnology (奈米生物技術)
Week 13 Nano Networking (奈米網路技術)
Week 14 Final Exam (期末考)
Week 15 Final oral presentation (期末口頭報告)
Week 16 Final oral presentation (期末口頭報告)
self-directed
learning		    02.Viewing multimedia materials related to industry and academia.
Evaluation
Class Participation and Attendance (25%)、Examinations and Assessments (50%)、Written and Oral Presentations (25%)
Textbook & other References
Textbook (教科書):
1. K.E. Drexler, Nanosystems: molecular machinery, manufacturing, and computation, Wiley Interscience, 1992.
2. Nanotechnology, a journal published by Institute of Physics.
3. Nano Letters, a journal published by American Chemical Society.
參考書目(References):
1. Pimpin, A. and W. Srituravanich, Review on Micro- and Nanolithography Techniques and Their Applications. Engineering Journal, 2012. 16: p. 37–56. (Core nanofabrication technologies—including optical lithography, electron-beam lithography, focused ion beam techniques, soft lithography, nanoimprint lithography, and scanning probe lithography—are introduced, together with their applications in the electronics, optoelectronics, biomedical, and energy fields.) (光學微影、電子束微影、聚焦離子束、軟微影、奈米壓印及掃描探針微影等核心奈米加工技術，並涵蓋其在電子、光電、醫療與能源領域之應用)
2. Gates, B.D., et al., New Approaches to Nanofabrication:  Molding, Printing, and Other Techniques. Chemical Reviews, 2005. 105(4): p. 1171–1196. (A review of nanofabrication strategies, including advanced approaches such as printing/imprinting and template-based fabrication methods.) (奈米製作策略的綜述，包括印刷/壓印與模板製作等先進方法)
Teaching Aids & Teacher's Website
The course is primarily delivered through lecture presentations, with selected topics supplemented by instructional videos available on YouTube.
上課以簡報方式呈現，部分授課內容會提供Youtube教學影片作輔助。
Office Hours
Please make an appointment in advance via email. Office hours are Thursday from 12:00 to 14:00 and Friday from 10:00 to 12:00.
請事先email預約。週四12:00-14:00和週五10:00-12:00
Sustainable Development Goals, SDGs(Link URL)
07.Affordable and Clean Energy   09.Industry, Innovation and Infrastructureinclude experience courses：N
Please respect the intellectual property rights and use the materials legally.Please respect gender equality.
Update Date, year/month/day：2026/02/07 08:54:40 Printed Date, year/month/day：2026 / 2 / 18
The second-hand book website：http://www.myub.com.tw/