| Course Name |
(中) 半導體工程(2338) |
| (Eng.) Semiconductor Engineering |
| Offering Dept |
Department of Electrical Engineering |
| Course Type |
Elective |
Credits |
3 |
Teacher |
LAY TSONG SHENG |
| Department |
Department of Electrical Engineering/Undergraduate |
Language |
English |
Semester |
2026-FALL |
| Course Description |
介紹半導體積體電路晶片製程及相關技術內容，涵蓋半導體基本特性、磊晶技術、熱處理、微影、蝕刻、電漿技術、離子佈植、蝕刻、薄膜沉積等。
Introduction to semiconductor manufacturing technology for integrated circuit chips, including semiconductor basics, wafer epitaxy, thermal processes, lithography, plasma basics, ion implantation, etching, thin film deposition, etc. |
| Prerequisites |
|
self-directed learning in the course |
Y |
| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
| 提供大學部同學學習半導體超大型積體電路製程相關技術內容，瞭解產業架構及發展趨勢。(For undergraduate students to Understand semiconductor manufacturing technology, and IC industry.) |
|
|
|
| Attendance |
| Assignment |
| Quiz |
|
| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
Introduction to IC Fabrication |
| Week 2 |
Semiconductor Basics (I) |
| Week 3 |
Semiconductor Basics (II) |
| Week 4 |
Wafers and Substrates (I) |
| Week 5 |
Wafers and Substrates (II) |
| Week 6 |
Thermal Process (I) |
| Week 7 |
Thermal Process (II) |
| Week 8 |
Photolithography (I) |
| Week 9 |
Photolithography (II) |
| Week 10 |
Plasma Basics (I) |
| Week 11 |
Plasma Basics (II) |
| Week 12 |
Ion Implantation (I) |
| Week 13 |
Ion Implantation (II) |
| Week 14 |
Etch |
| Week 15 |
CVD and Dielectric Thin Film (I) |
| Week 16 |
CVD and Dielectric Thin Film (II)
|
self-directed
learning |
01.Participation in professional forums, lectures, and corporate sharing sessions related to industry-government-academia-research exchange activities.
02.Viewing multimedia materials related to industry and academia.
|
|
| Evaluation |
| 期中考、期末考、習題作業、出席狀況 |
| Textbook & other References |
教科書:半導體製程技術導論, 第三版, 蕭宏, 全華圖書.
參考書:Semiconductor Devices Physics and Technology, by S. M. Sze, John Wiley
|
| Teaching Aids & Teacher's Website |
|
| Office Hours |
| 13:30-15:00, Thursday. |
| Sustainable Development Goals, SDGs(Link URL) |
| include experience courses：N |
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