| Course Name |
(中) 半導體工程(2338) |
| (Eng.) Semiconductor Engineering |
| Offering Dept |
Department of Electrical Engineering |
| Course Type |
Elective |
Credits |
3 |
Teacher |
LAY TSONG SHENG |
| Department |
Department of Electrical Engineering/Undergraduate |
Language |
English |
Semester |
2025-FALL |
| Course Description |
介紹半導體積體電路晶片製程及相關技術內容，涵蓋半導體基本特性、磊晶技術、熱處理、微影、蝕刻、電漿技術、離子佈植、蝕刻、薄膜沉積等。
Introduction to semiconductor manufacturing technology for integrated circuit chips, including semiconductor basics, wafer epitaxy, thermal processes, lithography, plasma basics, ion implantation, etching, thin film deposition, etc. |
| Prerequisites |
|
self-directed learning in the course |
Y |
| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
| 提供大學部同學學習半導體超大型積體電路製程相關技術內容，瞭解產業架構及發展趨勢。(For undergraduate students to Understand semiconductor manufacturing technology, and IC industry.) |
|
|
| Networking/Distance Education |
| Lecturing |
| Discussion |
|
| Attendance |
| Assignment |
| Quiz |
|
| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
Introduction to IC Fabrication |
| Week 2 |
Semiconductor Basics (I) |
| Week 3 |
Semiconductor Basics (II) |
| Week 4 |
Wafers and Substrates (I) |
| Week 5 |
Wafers and Substrates (II) |
| Week 6 |
Thermal Process (I) |
| Week 7 |
Thermal Process (II) |
| Week 8 |
Photolithography (I) |
| Week 9 |
Photolithography (II) |
| Week 10 |
Plasma Basics (I) |
| Week 11 |
Plasma Basics (II) |
| Week 12 |
Ion Implantation (I) |
| Week 13 |
Ion Implantation (II) |
| Week 14 |
Etch |
| Week 15 |
CVD and Dielectric Thin Film (I) |
| Week 16 |
CVD and Dielectric Thin Film (II) |
self-directed
learning |
01.Participation in professional forums, lectures, and corporate sharing sessions related to industry-government-academia-research exchange activities.
02.Viewing multimedia materials related to industry and academia.
|
|
| Evaluation |
| 期中考、期末考、習題作業、出席狀況 |
| Textbook & other References |
教科書:半導體製程技術導論, 第三版, 蕭宏, 全華圖書.
參考書:Semiconductor Devices Physics and Technology, by S. M. Sze, John Wiley
|
| Teaching Aids & Teacher's Website |
|
| Office Hours |
| 13:30-15:00, Thursday. |
| Sustainable Development Goals, SDGs(Link URL) |
| 01.No Poverty 02.Zero Hunger 04.Quality Education 05.Gender Equality 07.Affordable and Clean Energy 08.Decent Work and Economic Growth 09.Industry, Innovation and Infrastructure 10.Reduced Inequalities 11.Sustainable Cities and Communities 12.Responsible Consumption 13.Climate Action 14.Life Below Water 15.Life On Land 16.Peace and Justice 17.Partnerships for the Goals | include experience courses：N |
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