| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
| Introduce students to design and simulation of microactuators and microsensors. You will complete semester project combining STMicroelectronics' piezoresistive MEMS with a 1P6M process for a resistive sensing interface circuit. |
| 1.Ability to apply knowledge of mathematics, science, and manufacturing engineering |
| 2.Ability to design, conduct experiments, analyze data and write research papers |
| 3.Ability to integrate the fabrication process, device and system design, and product design |
|
|
| topic Discussion/Production |
| Networking/Distance Education |
| Exercises |
| Discussion |
| Lecturing |
|
| Written Presentation |
| Attendance |
| Oral Presentation |
| Assignment |
| Quiz |
|
| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
Characterize ST's piezoresistive MEMS (e.g., LIS2PW series)
|
| Week 2 |
Extract piezoresistor parameters
|
| Week 3 |
Model MEMS as a Wheatstone bridge
|
| Week 4 |
Report on MEMS electrical model and ΔR/acceleration sensitivity |
| Week 5 |
Readout IC Design based on a Instrumentation Amplifier (IA) + Sigma-Delta ADC |
| Week 6 |
Wheatstone Bridge Excitation |
| Week 7 |
Instrumentation Amplifier |
| Week 8 |
Sigma-Delta Modulator |
| Week 9 |
Schematics & simulation results (gain, noise, power)
Layout floorplan |
| Week 10 |
Co-design MEMS + CMOS 1P6M |
| Week 11 |
Design Rule |
| Week 12 |
Parasitic Extraction
|
| Week 13 |
Post-Layout Simulation |
| Week 14 |
DRC/LVS-clean GDSII |
| Week 15 |
Post-layout performance report |
| Week 16 |
final report |
self-directed
learning |
01.Participation in professional forums, lectures, and corporate sharing sessions related to industry-government-academia-research exchange activities.
03.Preparing presentations or reports related to industry and academia.
|
|
| Evaluation |
| Homework 50%, Project 50% |
| Textbook & other References |
Recommended text: S.D. Senturia, “Microsystem Design”, Kluwer.
Recommended Text: G.T.A. Kovacs, “Micromachined Transducers Sourcebook”, WCB/McGraw-Hill, 高立.
|
| Teaching Aids & Teacher's Website |
| ilearning |
| Office Hours |
| Tuesdays noon – 1pm |
| Sustainable Development Goals, SDGs(Link URL) |
| 04.Quality Education 07.Affordable and Clean Energy 08.Decent Work and Economic Growth 09.Industry, Innovation and Infrastructure | include experience courses：N |
|