NCHU Course Outline
Course Name (中) 微感測器與微致動器(6877)
(Eng.) Micro Sensors and Actuators
Offering Dept Graduate Institute of Precision Engineering
Course Type Elective Credits 3 Teacher WANG, DUNG-AN
Department Graduate Institute of Precision Engineering/Graduate Language English Semester 2025-FALL
Course Description Study of physics and operational principles for microelectromechanical devices and systems and their applications. Emphasize on design and simulation of microactuators and microsensors. Analytical and numerical methods for design and simulation will be taught in this course. Students are required to learn and familiar with Matlab and finite element methods. The course includes a term project that involves the design, analysis and layout of a MEMS device.
學習微機電系統的物理基礎與操作原理。強調微致動器與微感測器的設計與模擬。解析與數值方法將在課堂上教授。學生需繳交期末報告。
Prerequisites
self-directed learning in the course Y
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
Introduce students to design and simulation of microactuators and microsensors. 介紹微致動器與微感測器之設計與模擬的概念。
topic Discussion/Production
Networking/Distance Education
Exercises
Discussion
Lecturing
Written Presentation
Attendance
Oral Presentation
Assignment
Quiz
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 Course introduction
Week 2 Electronics
Week 3 Electronics
Week 4 Klayout
Week 5 Klayout
Week 6 pressure sensor
Week 7 piezeresistive sensing
Week 8 sensing circuit
Week 9 sensing circuit
Week 10 presim
Week 11 presim
Week 12 Layout
Week 13 Layout
Week 14 postsim
Week 15 postsim
Week 16 finite element analysis Tape out final report
self-directed
learning

Evaluation
Homework 50%, Project 50%
Textbook & other References
Required text: S.D. Senturia, “Microsystem Design”, Kluwer.
Recommended Text: G.T.A. Kovacs, “Micromachined Transducers Sourcebook”, WCB/McGraw-Hill, 高立.
Teaching Aids & Teacher's Website
web.nchu.edu.tw/~daw/Teaching/SA/sensor_actuator.htm
Office Hours
Tuesdays 9 – 10pm
Sustainable Development Goals, SDGs(Link URL)
07.Affordable and Clean Energy   08.Decent Work and Economic Growth   09.Industry, Innovation and Infrastructure   10.Reduced Inequalities   14.Life Below Water   15.Life On Land   17.Partnerships for the Goalsinclude experience courses:Y
Please respect the intellectual property rights and use the materials legally.Please respect gender equality.
Update Date, year/month/day:None Printed Date, year/month/day:2025 / 6 / 18
The second-hand book website:http://www.myub.com.tw/