| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
Study of design and analysis of microelectromechanical devices and systems and their applications.
學習微機電系統的設計、分析及應用。
|
| 1.Ability to apply knowledge of mathematics, science, and manufacturing engineering |
| 3.Ability to integrate the fabrication process, device and system design, and product design |
| 5.Ability to extend the world view of Precision Engineering and micro technology |
|
|
| Exercises |
| Discussion |
| Lecturing |
|
| Oral Presentation |
| Assignment |
| Quiz |
|
| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
Overview |
| Week 2 |
Bulk micromachining |
| Week 3 |
Surface micromachining |
| Week 4 |
Elasticity |
| Week 5 |
Elasticity |
| Week 6 |
EXAM I |
| Week 7 |
Mechanical structures |
| Week 8 |
Mechanical structures |
| Week 9 |
Energy methods |
| Week 10 |
Energy methods |
| Week 11 |
ExaM II |
| Week 12 |
Actuators |
| Week 13 |
Dynamics |
| Week 14 |
Dynamics |
| Week 15 |
System modeling |
| Week 16 |
Symterm modeling |
| Week 17 |
Case study |
| Week 18 |
Final exam |
|
| Evaluation |
| Homework 50%, Project 50% |
| Textbook & other References |
| S. D. Senturia, “Microsystem Design”, Kluwer Acamedic Publishers. 2001 |
| Teaching Aids & Teacher's Website |
| ilearning |
| Office Hours |
| Tuesdays 11 – noon |
| Sustainable Development Goals, SDGs(Link URL) |
| 04.Quality Education 07.Affordable and Clean Energy 09.Industry, Innovation and Infrastructure | include experience courses：N |
|