NCHU Course Outline

Course Name	(中) 微電子實驗(3415)
	(Eng.) Lab in Microelectronics
Offering Dept	Department of Electrical Engineering
Course Type	Elective			Credits	1	Teacher	YEU-LONG JIANG et al.
Department	Department of Electrical Engineering / Undergraduate			Language	Chinese	英文/EMI		Semester	2025-FALL
Course Description	本課程為光電及固態組基本實驗課程，內容包含光電及半導體元件各製作步驟及光偵測器與金氧半(MOS)元件的實作訓練。 This course offers practical training in fabricating and characterizing optoelectronic and semiconductor devices.
Prerequisites

Relevance of Course Objectives and Core Learning Outcomes(%)			Teaching and Assessment Methods for Course Objectives
Course Objectives	Competency Indicators	Ratio(%)	Teaching Methods	Assessment Methods
本課程使學生學習光電及半導體元件的製作步驟與元件的特性測量與分析。 This course covers the manufacturing processes of optoelectronic and semiconductor devices, along with the measurement and analysis of their characteristics.	3.ability to plan and use technical skills in research projects and various electrical engineering practices 4.ability to collect data, think independently, solve problems, and innovate 5.ability to guide, manage, plan, and communicate effectively, and demonstrate clearly, cultivate the spirit of teamwork, and understand the importance of engineering ethics 6.cultivation of a cosmopolitan worldview and understanding of high-tech trends 7.cultivation of self-study abilities and lifelong learning habits	20 20 20 20 20	Lecturing Practicum Exercises topic Discussion / Production	Internship Study Outcome Oral Presentation Attendance
Course Content and Homework/Schedule/Tests Schedule
Week Course Content Week 1 1. 試片清潔 Sample cleaning Week 2 2. 光蝕刻製程 Photolithography process Week 3 3. 高溫氧化製程 High-temperature oxidation process Week 4 4. 物理氣相沉積系統 Physical vapor deposition system Week 5 5. 化學氣相沉積系統 Chemical vapor deposition system Week 6 6. Al金屬圖案蝕刻製程及測量 The aluminum metal pattern etching process and measurement Week 7 6. Al金屬圖案蝕刻製程及測量 The aluminum metal pattern etching process and measurement Week 8 期中報告及自我學習 Midterm Report and self-directed learning Week 9 7. ITO透明導電膜製作及測量 ITO Transparent Conductive Film Fabrication and Measurement Week 10 7. ITO透明導電膜製作及測量 ITO Transparent Conductive Film Fabrication and Measurement Week 11 8. MOS電容器製作及測量 MOS capacitor Fabrication and measurement Week 12 8. MOS電容器製作及測量 MOS capacitor Fabrication and measurement Week 13 9. 光偵測器製作及測量 Fabrication and measurement of photodetectors Week 14 9. 光偵測器製作及測量 Fabrication and measurement of photodetectors Week 15 9. 光偵測器製作及測量 Fabrication and measurement of photodetectors Week 16 10. 期末報告及自我學習 End of Semester Report and self-directed learning self-directed learning    03.Preparing presentations or reports related to industry and academia.
Evaluation
成品實作 1. 鋁金屬圖案成形，厚度與電阻測量 2. MOS capacitor製作與特性分析 3. 光偵測器製作與特性分析 期中報告 期末報告 1. Aluminum metal pattern formation, thickness, and resistance measurement 2. MOS capacitor fabrication and characterization analysis 3. Fabrication and analysis of photodetectors 4. Mid-term report 5. Final report
Textbook & other References
自編講義
Teaching Aids & Teacher's Website
http://lab902.ee.nchu.edu.tw/
Office Hours
星期五10:00-12:00
Sustainable Development Goals, SDGs(Link URL)
04.Quality Education   09.Industry, Innovation and Infrastructure include experience courses：N

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