NCHU Course Outline
Course Name (中) 真空技術(6929)
(Eng.) Vacuum Technology
Offering Dept Master Program in Industrial and Smart Technology
Course Type Elective Credits 3 Teacher 陳峰志
Department Master Program in Industrial and Smart Technology / Graduate Language Chinese Semester 2025-FALL
Course Description 真空技術是現代科技的基石,特別是半導體、顯示器、光電⋯ 等高科技製造產業,多項關鍵核心製程與量測都是在真空系統中進行。其它包括同步輻射、電子顯微鏡、質譜儀、能譜儀等科學分析儀器也都是相當典型的真空系統應用,乃至民生相關的食品包裝、眼鏡鍍膜⋯ 等,真空技術都扮演著重要的核心角色。因此,真空技術可說是高科技產業及科學研究發展的重要基礎。真空技術課程內容包括真空技術的基礎理論、各式真空幫浦的介紹、各類真空元件及材料、真空系統的設計組裝、真空測漏、真空度量與檢校,以及真空系統的應用。
Prerequisites
Relevance of Course Objectives and Core Learning Outcomes(%) Teaching and Assessment Methods for Course Objectives
Course Objectives Competency Indicators Ratio(%) Teaching Methods Assessment Methods
1. 以真空系統個案研究,學習真空系統組成,以及技術發展趨勢。
2. 培養真空系統、元件或製程之能力
3. 培養跨領域系統整合與運用真空系統的素養。
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2.
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5.
20
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20
20
Visit
Exercises
Discussion
Lecturing
Written Presentation
Attendance
Assignment
Quiz
Course Content and Homework/Schedule/Tests Schedule
Week Course Content
Week 1 真空概論
Week 2 氣體分子動力論
Week 3 氣流與氣導(一)
Week 4 氣流與氣導(二)
Week 5 氣體的吸附和逸氣
Week 6 真空度量
Week 7 真空度量及其標準與校正
Week 8 期中考試
Week 9 真空幫浦(一)
Week 10 真空幫浦(二)
Week 11 真空流量計
Week 12 真空材料、元件與封合(一)
Week 13 真空材料、元件與封合(二)
Week 14 真空系統設計與裝配
真空測試與測漏
Week 15 真空設備產學機構教學參訪
Week 16 期末考試
self-directed
learning
   01.Participation in professional forums, lectures, and corporate sharing sessions related to industry-government-academia-research exchange activities.
   02.Viewing multimedia materials related to industry and academia.
   04.Participation in visits or internships at industry, government, or academic institutions.

Evaluation
出席狀況、隨堂作業、期中考試、教學參訪書面報告、期末考試
Textbook & other References
自製講義
參考書目:
1. 真空技術與應用(Vacuum Technology & Application),國家實驗研究院儀器科技研究中心出版
2. Vacuum Technology, L.G. Carpenter, ed. 1983, A Hilger
3. Vacuum Technology, 2nd, rev. ed. A. Roth 1982, Elserier
4. 蘇青森,真空技術,東華書局
5. 呂登復,實用真空技術,國興出版社
Teaching Aids & Teacher's Website

Office Hours
每週三下午 4:00 至 5:00
Sustainable Development Goals, SDGs(Link URL)
03.Good Health and Well-Being   04.Quality Education   08.Decent Work and Economic Growth   09.Industry, Innovation and Infrastructureinclude experience courses:Y
Please respect the intellectual property rights and use the materials legally.Please respect gender equality.
Update Date, year/month/day:2025/06/26 16:12:24 Printed Date, year/month/day:2026 / 3 / 12
The second-hand book website:http://www.myub.com.tw/