國立中興大學教學大綱

課程名稱	(中) 微電子真空技術(6779)
	(Eng.) Microelectronics Vacuum Technology
開課單位	電機系
課程類別	選修			學分	3	授課教師	馬佐恩
選課單位	電系統產 / 產專班			授課使用語言	英文	開課學期	1142
課程簡述	This course introduces students to the principles, equipment, and applications of modern vacuum systems. It covers the fundamentals of gas behavior, pressure regimes, and surface interactions, as well as the practical applications of vacuum technology in semiconductor fabrication, thin-film deposition, nanostructure growth, and analytical instrumentation.
先修課程名稱

課程與核心能力關聯配比(%)			課程目標之教學方法與評量方法
課程目標	核心能力	配比(%)	教學方法	評量方法
- To understand the physics underlying vacuum environments. - To gain familiarity with the design and operation of vacuum equipment. - To apply vacuum techniques to materials science, electronics, and nanotechnology. - To develop troubleshooting and optimization skills for laboratory and industrial systems.			專題探討/製作 習作 討論 講授	書面報告 口頭報告 作業 測驗
授課內容(單元名稱與內容、習作/每週授課、考試進度-共16週加自主學習)
週次 授課內容 第1週 Introduction to Vacuum Microelectronics and Vacuum Technology 第2週 Foundation: Gas Properties and Gas Laws 第3週 Gas Flow 第4週 Gas Release from Solids (I) 第5週 Gas Release from Solids (II) 第6週 Creation of a Vacuum 第7週 Vacuum Measurements 第8週 Midterm Exam 第9週 Vacuum Applications High-Vacuum-Based Processes: Sputtering 第10週 Vacuum Applications High-Vacuum-Based Processes: Plasma Etching (I) 第11週 Vacuum Applications High-Vacuum-Based Processes: Plasma Etching (II) 第12週 Vacuum Applications High-Vacuum-Based Processes: Ion Beam Technology 第13週 Vacuum Applications High-Vacuum-Based Processes: Pulsed Laser Deposition 第14週 Vacuum Applications High-Vacuum-Based Processes: Plasma-Enhanced Chemical Vapor Deposition 第15週 Common Analytical Methods for Surface and Thin Film 第16週 Final Exam 自主學習 內容    03.製作專題報告 -In-depth self-study in relevant literature, research papers, and industrial reports related to microelectronics vacuum technology -Written report and oral presentation about the topics of self-study
學習評量方式
1. Classroom performance 10% 2. Homework and quiz 10% 3. Report and presentation 20% 4. Midterm exam 30% 5. Final exam 30%
教科書＆參考書目(書名、作者、書局、代理商、說明)
1. Dorothy M. Hoffman, Bowa Singh, John H. Thomas, III, "Handbook of Vacuum Science and Technology," Academic Press, 1998. 2. Karl Jousten, “Handbook of Vacuum Technology,” Wiley-VCH, 2nd Edition, 2016. 3. John F. O'Hanlon, "A User Guide to Vacuum Technology," Cambridge University Press, John Wiley & Sons, Inc., 3rd Edition, 2003.
課程教材（教師個人網址請列在本校內之網址）
課程輔導時間
Wednesday 9:10-12:00
聯合國全球永續發展目標(連結網址)
04.教育品質   08.就業與經濟成長   09.工業、創新基礎建設 提供體驗課程：N

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