| Relevance of Course Objectives and Core Learning Outcomes(%) |
Teaching and Assessment Methods for Course Objectives |
| Course Objectives |
Competency Indicators |
Ratio(%) |
Teaching Methods |
Assessment Methods |
| 了解半導體製程及超大型積體電路尖端製造技術，以做為相關研究或就業的基礎.After taking this course, students will familiar with common semiconductor terminology, a basic IC fabrication sequence and each process step, which can be as a basis for related research or employment. |
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|
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| Written Presentation |
| Attendance |
| Oral Presentation |
| Assignment |
| Quiz |
|
| Course Content and Homework/Schedule/Tests Schedule |
| Week |
Course Content |
| Week 1 |
Semiconductor Physics and Devices |
| Week 2 |
Evolution of IC Industry |
| Week 3 |
Overview of IC Fabrication |
| Week 4 |
Introduction to Clean Room |
| Week 5 |
Crystal Growth |
| Week 6 |
Epitaxy |
| Week 7 |
Photolithography |
| Week 8 |
Advanced Photolithography |
| Week 9 |
Oxidation and Diffusion |
| Week 10 |
Thin Film Deposition |
| Week 11 |
Etching |
| Week 12 |
Ion implantation |
| Week 13 |
Final Exam. |
| Week 14 |
期末報告A |
| Week 15 |
期末報告B |
| Week 16 |
期末報告C |
self-directed
learning |
01.Participation in professional forums, lectures, and corporate sharing sessions related to industry-government-academia-research exchange activities.
02.Viewing multimedia materials related to industry and academia.
|
|
| Evaluation |
| 作業、考試、口頭報告、書面報告 |
| Textbook & other References |
教科書
C.Y. Chang & S.M.Sze:ULSI Technology McGraw-Hill Companies,Inc.
參考書
Xiao :Introduction to Semiconductor Manufacturing Technology |
| Teaching Aids & Teacher's Website |
| 自編講義(iLearning3.0) |
| Office Hours |
Tuesday 10:00-12:00, Thursday 14:00-16:00
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| Sustainable Development Goals, SDGs(Link URL) |
| 04.Quality Education 07.Affordable and Clean Energy 08.Decent Work and Economic Growth 09.Industry, Innovation and Infrastructure 11.Sustainable Cities and Communities 12.Responsible Consumption | include experience courses：N |
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