| 國立中興大學教學大綱 |
| 課程名稱 | (中) 電子能譜表面分析(6859) | ||||||||
| (Eng.) Surface Analysis by XPS and AES | |||||||||
| 開課單位 | 材料系 | ||||||||
| 課程類別 | 選修 | 學分 | 3 | 授課教師 | 張立信 | ||||
| 選課單位 | 材料系 / 碩士班 | 授課使用語言 | 中文 | 英文/EMI | N | 開課學期 | 1061 | ||
| 課程簡述 | (中) 材料之化學組成是研究材料者必備的基礎資訊。電子能譜儀，包括X光光電子能譜儀(XPS)與歐傑電子能譜儀(AES)，是分析材料表面成分與鍵結所不可或缺的工具。本課程將教授以電子能譜儀分析材料表面成份所需具備的知識。使學生習得電子能譜儀之基礎概念、設計、功能、定性定量分析、化學組態詮釋、縱深分佈與應用實例等。 (Eng) The composition of a material is the basic information for a material researcher. The electron spectroscopy including the X-ray photoelectron spectroscopy (XPS) and the Auger electron spectroscopy (AES) is an essential tool for surface compositional analysis. In this course, the fundamental knowledge for surface analysis by XPS and AES is taught. Students learn the basic concepts, design, functions, qualitative and quantitative analysis, chemical state information, depth profiling and application examples of the electron spectroscopy. |
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| 先修課程名稱 | 課程含自主學習 | N | |||||||
| 課程與核心能力關聯配比(%) | 課程目標之教學方法與評量方法 | ||||||||||||||||||||
| 課程目標 | 核心能力 | 配比(%) | 教學方法 | 評量方法 | |||||||||||||||||
| 1. 具備XPS與AES之基礎概念 (To possess the basic concepts of XPS and AES) 2. 了解表面分析之需求、儀器基本設計、組件以及功能 (To know the requirements for surface analysis and equipement basic design, components and functions) 3. 了解成分之定性、定量分析以及化學狀態訊息 (To understand qualitative, quantitative analysis and chemical state information) 4. 了解角度解析、離子轟擊以及機械分區之縱深分析 (To understand depth profiling by angle resolving, ion sputtering and mechanical sectioning) 5. 學習應用實例，包括 I 冶金、 II 腐蝕與陶瓷、 III 微電子與半導體以及 IV 高分子 (To study application examples including I metallurgy, II corrosion and ceramic, III microelectronics and semiconductors and IV polymers) |
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| 授課內容(單元名稱與內容、習作/每週授課、考試進度-共18週) | |||||||||||||||||||||
| 週次 日期 (日期date) 內容Course content ---作業Homework 01 (2017/09/21) 簡介與基礎概念Introduction and Basic Concepts 02 (2017/09/28) 能譜儀設計Spectrometer Design 03 (2017/10/05) 能譜儀功能Spectrometer Functions ---Homework 1 04 (2017/10/12) 定性分析Qualitative Analysis 05 (2017/10/19) 定量分析Quantitative Analysis ---Homework 2 06 (2017/10/26) 化學組態詮釋Chemical State Information 07 (2017/11/02) 化學組態詮釋Chemical State Information ---Homework 3 08 (2017/11/09) 作業討論Homework Discussion 09 (2017/11/16) 期中考Midterm 10 (2017/11/23) 縱深分析Depth Profiling 11 (2017/11/30) 縱深分析Depth Profiling ---Homework 4 12 (2017/12/07) 應用實例I Application Examples I 13 (2017/12/14) 應用實例II Application Examples II ---Homework 5 14 (2017/12/21) 應用實例III Application Examples III 15 (2017/12/28) 應用實例IV Application Examples IV ---Homework 6 16 (2018/01/04) 作業討論Homework Discussion 17 (2018/01/11) 儀器參觀Instrument visit 18 (2018/01/18) 期末報告Final Report |
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| 學習評量方式 | |||||||||||||||||||||
| 1. 學期成績計算項目及權重標準如下： A. 期末報告 35% B. 期中考試 35% C. 課後作業 30% 2. 期末報告： 期末報告配合學校時程舉辦。題目需與電子能譜表面分析相關。報告規定將於課中說明。 3. 期中考試： 期中考試配合學校時程舉辦。期中考試內容為考前授課內容。 4. 課後作業： 課後定期將指定練習題數題，要求學生完成，並於指定後一週繳交紙本作業。 (Eng.) 1. The percentages of items concerned: A. Final report 35% B. Midterm exam 35% C. Homeworks 30% 2. Final report The final report is carried out according to the semester schedule. The topic of report should relate to the surface analysis by electron spectroscopy. The regulation of final report will be stated in the course. 3. Midterm exam The midterm exam is carried out according to the semester schedule. The content taught prior to the exam is the target of the exam. 4. Homeworks Several exercises of each chapter are assigned as the homework after finishing the lecture of the chapter. Students are asked to accomplish them and hand in their homeworks on the next course. |
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| 教科書＆參考書目(書名、作者、書局、代理商、說明) | |||||||||||||||||||||
| Textbook: An Introduction to Surface Analysis by XPS and AES, J. F. Watts and J. Wohlstenholme, Wiley, 2003 (興大電子書 NetLibrary) References: 1. Auger- and X-Ray Photoelectron Spectroscopy in Materials Science - A User-Oriented Guide, S. Hofmann, Springer, 2012 2. Surface Analysis - The Principal Techniques, 2nd ed., edited by J.C. Vickerman, I.S. Gilmore, Wiley, Singapore, 2009 3. 材料表面科學, 曹立礼, 清華大學出版社,北京, 2007 4. Fundamentals of Nanoscale Film Analysis, T.L. Alford, L.C. Feldman, J.W. Mayer, Springer, USA, 2007 5. Surface Analysis Methods in Materials Science, edited by D.J. O’Connor, B.A. Sexton and R.St.C. Smart, Springer, 1992 |
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| 課程教材（教師個人網址請列在本校內之網址） | |||||||||||||||||||||
| 課程輔導時間 | |||||||||||||||||||||
| 每週三(Wednesday) 15:00~17:00 | |||||||||||||||||||||
| 聯合國全球永續發展目標 | |||||||||||||||||||||
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| 請尊重智慧財產權及性別平等意識，不得非法影印他人著作。 | |
| 更新日期 西元年/月/日：無 | 列印日期 西元年/月/日：2024 / 12 / 28 |
| MyTB教科書訂購平台：http://www.mytb.com.tw/ | |