國立中興大學教學大綱

課程名稱	(中) 電子能譜表面分析(6830)
	(Eng.) Surface Analysis by XPS and AES
開課單位	材料系
課程類別	選修	學分	3	授課教師	張立信
選課單位	材料系 / 碩士班	授課使用語言	中文	英文/EMI	N	開課學期	1092
課程簡述	(中) 材料之化學組成是研究材料者必備的基礎資訊。電子能譜儀，包括X光光電子能譜儀(XPS)與歐傑電子能譜儀(AES)，是分析材料表面成分與鍵結所不可或缺的工具。本課程將教授以電子能譜儀分析材料表面成份所需具備的知識。使學生習得電子能譜儀之基礎概念，了解儀器設計與功能，學會定性與定量分析之原理與方法(含化學狀態詮釋)，學會組成縱深分佈，學會分析實務和四類應用實例。 (Eng.) The composition of a material is the basic information for a material researcher. The electron spectroscopy including the X-ray photoelectron spectroscopy (XPS) and the Auger electron spectroscopy (AES) is an essential tool for surface compositional analysis. In this course, the fundamental knowledge for surface analysis by XPS and AES is taught. Students learn the basic concepts, instrumental designs and functions, the principles and methods of qualitative and quantitative analyses including chemical state interpretation, compositional depth profiling, practice of analysis and four categories of application examples of the electron spectroscopy.
先修課程名稱						課程含自主學習	N

課程與核心能力關聯配比(%)

課程目標之教學方法與評量方法

課程目標

核心能力

配比(%)

教學方法

評量方法

(中)
1. 具備XPS與AES之基礎概念
2. 了解表面分析之需求、儀器基本設計、組件以及功能
3. 學會成分之定性與定量分析之原理與方法(含化學狀態詮釋)
4. 學會角度解析、離子轟擊以及機械分區之組成縱深分析
5. 學習分析實務與應用實例，包括冶金、微電子與半導體、腐蝕與陶瓷以及高分子
(Eng.)
1. To possess the basic concepts of XPS and AES
2. To know the requirements for surface analysis and equipment basic design, components and functions
3. To learn the principles and methods of qualitative and quantitative analyses including chemical state interpretation
4. To learn compositional depth profiling by angle resolving, ion sputtering and mechanical sectioning
5. To study the practice of analysis and application examples including metallurgy, microelectronics and semiconductors, corrosion and ceramic, and polymers

1.特定材料之專業知識

2.策劃及執行專題研究之能力

3.撰寫專業論文之能力

授課內容(單元名稱與內容、習作/每週授課、考試進度-共18週)

週次日期日期date 內容Course content 進度Schedule
01 2021/2/25 簡介與基礎概念Introduction and Basic Concepts
02 2021/3/4 能譜儀設計與功能Spectrometer Designs and Functions
03 2021/3/11 能譜儀設計與功能Spectrometer Designs and Functions 課後作業1 Homework 1
04 2021/3/18 定性與定量分析Qualitative and Quantitative Analyses 作業討論 HW Discussion
05 2021/3/25 定性與定量分析Qualitative and Quantitative Analyses 課後作業2 Homework 2
06 2021/4/1 定性與定量分析Qualitative and Quantitative Analyses 作業討論 HW Discussion
07 2021/4/8 定性與定量分析Qualitative and Quantitative Analyses
08 2021/4/15 定性與定量分析Qualitative and Quantitative Analyses 課後作業3 Homework 3
09 2021/4/22 期中考Midterm 4/21作業討論 HW Discussion
10 2021/4/29 組成縱深分析Compositional Depth Profiling 考題討論 Exam Discussion
11 2021/5/6 組成縱深分析Compositional Depth Profiling
12 2021/5/13 組成縱深分析Compositional Depth Profiling 課後作業4 Homework 4
13 2021/5/20 應用實例I Application Examples I 作業討論 HW Discussion
14 2021/5/27 應用實例II Application Examples II
15 2021/6/3 應用實例III Application Examples III 課後作業5 Homework 5
16 2021/6/10 應用實例IV Application Examples IV 作業討論 HW Discussion
17 2021/6/17 應用實例IV Application Examples IV 課後作業6 Homework 6
18 2021/6/24 期末報告Final Report 6/23作業討論 HW Discussion

學習評量方式

(中)
1. 學期成績計算項目及權重標準如下：
　　A. 期中考試 35%
　　B. 期末報告 35%
　　C. 課後作業 30%
2. 期中考試：
　　期中考試在第九週上課舉辦。期中考試內容為考前授課內容。
3. 期末報告：
　　期末報告在第十八週上課舉辦。題目需與電子能譜表面分析相關。報告規定將於課中說明。
4. 課後作業：
　　課後定期將指定練習題數題，學生須於指定後下週上課前一天中午前繳交作業。
(Eng.)
1. The percentages of items concerned:
　　A. Final report 35%
　　B. Midterm exam 35%
　　C. Homeworks 30%
2. Midterm exam
　　The midterm exam is carried out in the ninth week of the semester. The content taught in the course prior to exam is the target of the exams.
3. Final report
　　The final report is carried out according to the semester schedule. The topic of report should relate to the surface analysis by electron spectroscopy. The regulation of final report will be stated in the course.
4. Homework
　　Several exercises are assigned as the homework regularly. Students must hand in their works before noon at the day prior to the next course.

教科書＆參考書目(書名、作者、書局、代理商、說明)

Textbook:
John F. Watts and John Wohlstenholme, “An Introduction to Surface Analysis by XPS and AES,” Wiley, Great Britain, 2003. (電子書 electronic resource)

References:
1. Siegfried Hofmann, “Auger- and X-Ray Photoelectron Spectroscopy in Materials Science - A User-Oriented Guide,” Springer, ebook, 2013. (電子書 electronic resource)
2. John C. Vickerman and Ian S. Gilmore (eds.), “Surface Analysis - The Principal Techniques,” 2nd ed., Wiley, Singapore, 2009. (電子書 electronic resource)
3. 曹立礼, “材料表面科學,” 清華大學出版社, 北京, 2007. (電子書 electronic resource)
4. John F. Moulder, William F. Strickle, Peter E. Sobol and Kenneth D. Bomben, “Handbook of X-ray Photoelectron Spectroscopy,” ed. by J. Chastain and R. C. King, Jr., ULVAC-PHI, Japan, 1995.
5. D. J. O’Conner, B. A. Sexton and R. St. C. Smart (eds.), “Surface Analysis Methods in Materials Science,” Springer, Germany, 1992.

課程教材（教師個人網址請列在本校內之網址）

教師自編講義 (Handout composed by the teacher)

課程輔導時間

週三下午03:00~05:00 (03:00~05:00 pm, Wednesday)

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更新日期西元年/月/日：無	列印日期西元年/月/日：2024 / 12 / 29
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